Fabrication of Zn-indiffused LiNbO3 optical waveguides using ZnS as diffusion source

被引：0
|
作者：
Selvan, JS [1 ]
Fujimura, M [1 ]
Suhara, T [1 ]
机构：
[1] Osaka Univ, Grad Sch Engn, Dept Elect Engn, Suita, Osaka 5650871, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2005年 / 44卷 / 5A期
关键词：
lithium niobate; waveguide; Zn-indiffusion; ZnS; integrated optics;
D O I：
暂无
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Fabrication of Zn-indiffused LiNbO3 waveguides using ZnS as a diffusion source is proposed and demonstrated for the first time. Possibility of Zn diffusion into Z-cut LiNbO3 using ZnS was examined. The diffusion in low-pressure atmosphere produced Zn-diffused crystals with a smooth surface. Single-mode waveguiding for transverse magnetic (TM) and transverse electric (TE) modes was achieved at 1.5 mu m wavelength in the channel waveguides fabricated by the diffusion of ZnS film at 890 degrees C for 30 min in oxygen at 1 Torr pressure.
引用
收藏
页码：3075 / 3076
页数：2
相关论文
共 50 条
  • [1] Fabrication of Zn-indiffused LiNbO3 optical waveguides using ZnS as diffusion source
    Senthil Selvan, Jayaraman
    Fujimura, Masatoshi
    Suhara, Toshiaki
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2005, 44 (5 A): : 3075 - 3076
  • [2] Fabrication of photorefractive damage resistant active waveguides based on Zn-indiffused LiNbO3
    Lifante, G
    Domenech, M
    Cantelar, E
    Pernas, PL
    Sanz-García, JA
    Torchia, GA
    Cussó, F
    INTEGRATED OPTICAL DEVICES: FABRICATION AND TESTING, 2002, 4944 : 117 - 125
  • [3] Second order susceptibilities and electro-optic coefficients of ZN-indiffused LiNbO3 waveguides
    Caballero-Calero, Olga
    de la Paliza, Gonzalo
    Garcia-Cabanes, Angel
    Carrascosa, Mercedes
    Domenech, Manuela
    Lifante, Gines
    FERROELECTRICS, 2007, 352 : 412 - 418
  • [4] Fabrication of Zn-indiffused LiNbO3 optical waveguides by diffusing sol-gel spin-coated ZnO film at low-pressure atmosphere
    Senthil Selvan, J., 1600, Japan Society of Applied Physics (43):
  • [5] Fabrication of Zn-indiffused LiNbO3 optical waveguides by diffusing sol-gel spin-coated ZnO film at low-pressure atmosphere
    Selvan, JS
    Fujimura, M
    Suhara, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2004, 43 (8A): : 5313 - 5315
  • [6] Ridge-type Zn-indiffused Mach-Zehnder modulator in LiNbO3
    Twu, Ruey-Ching
    Huang, Chia-Chih
    Wang, Way-Seen
    IEICE TRANSACTIONS ON ELECTRONICS, 2007, E90C (02) : 481 - 483
  • [7] Wavelength-dependent diffusion conditions of nickel-indiffused LiNbO3 optical waveguides
    Chang, WC
    Sue, CY
    Hou, HC
    Hsuan, MY
    MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, 1999, 22 (05) : 358 - 361
  • [8] Nickel -: indiffused x, y -: cut LiNbO3 optical waveguides
    Cheung, CS
    Pun, EYB
    Li, EH
    SELECTED PAPERS FROM PHOTONICS INDIA '98, 1999, 3666 : 147 - +
  • [9] FABRICATION OF LINBO3 WAVEGUIDES BY TITANIUM DIFFUSION
    SUGII, K
    FUKUMA, M
    NODA, J
    IWASAKI, H
    FERROELECTRICS, 1978, 19 (3-4) : 168 - 168
  • [10] INVESTIGATION OF THE DIFFUSION OF TITANIUM INTO LiNbO3 IN THE FABRICATION OF OPTICAL WAVEGUIDES.
    Zolotov, E.M.
    Prokhorov, A.M.
    Chernykh, V.A.
    Soviet journal of quantum electronics, 1980, 10 (04): : 479 - 482
12345