A 2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator

被引：46
作者：
Koh, Kah How [1 ]
Kobayashi, Takeshi [2 ]
Lee, Chengkuo [1 ]
机构：
[1] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117576, Singapore
[2] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058564, Japan
来源：
OPTICS EXPRESS | 2011年 / 19卷 / 15期
关键词：
FORCE;
D O I：
10.1364/OE.19.013812
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A novel dynamic excitation of an S-shaped PZT piezoelectric actuator, which is conceptualized by having two superimposed AC voltages, is characterized in this paper through the evaluation of the 2-D scanning characteristics of an integrated silicon micromirror. The device is micromachined from a SOI wafer with a 5 mu m thick Si device layer and multilayers of Pt/Ti/PZT//Pt/Ti deposited as electrode and actuation materials. A large mirror (1.65mm x 2mm) and an S-shaped PZT actuator are formed after the backside release process. Three modes of operation are investigated: bending, torsional and mixed. The resonant frequencies obtained for bending and torsional modes are 27Hz and 70Hz respectively. The maximum measured optical deflection angles obtained at 3V(pp) are +/- 38.9 degrees and +/- 2.1 degrees respectively for bending and torsional modes. Various 2-D Lissajous patterns are demonstrated by superimposing two ac sinusoidal electrical signals of different frequencies (27Hz and 70Hz) into one signal to be used to actuate the mirror. (C) 2011 Optical Society of America
引用
收藏
页码：13812 / 13824
页数：13
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