erosion plume;
Langmuir probe;
ion scatter velocity;
electron temperature;
D O I:
10.1117/12.418797
中图分类号:
O43 [光学];
学科分类号:
070207 ;
0803 ;
摘要:
The Langmuir probe was used to study erosion plume resulting from ablation of a tantalum target in vacuum with excimer laser (308 nm) radiation. The spatial and temporal dependencies of electron and ion probe currents were obtained in real time. Relying upon a series of dependencies of electron probe currents on the value of probe potential,; electron temperature of different plume regions was taken at various distances from the target. It was established that the plume electron temperature is non-uniform. The ion concentration in the plume determined at various distances from the target.