Modeling and simulation of material removal with particulate flows

被引:8
作者
Arbelaez, D. [1 ]
Zohdi, T. I. [1 ]
Dornfeld, D. A. [1 ]
机构
[1] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA
关键词
granular flow; material removal; CMP;
D O I
10.1007/s00466-008-0273-3
中图分类号
O1 [数学];
学科分类号
0701 ; 070101 ;
摘要
In this work a multibody collision model, ame-nable to large-scale computation, is developed to simulate material removal with particulate flows. This model is developed by computing momentum exchange to account for different force interactions: (1) particle-particle interaction, (2) particle-fluid interaction, and (3) particle-surface interaction. For the particle-fluid interaction, a velocity field for the fluid is assumed to be known, and the drag force on the particles is computed from this field. In the particle-surface interaction, the Boussinesq solution for a point load on an elastic half-space is used along with the von-Mises yield criterion to determine the amount of material removed. Employing this model, inverse problems are then constructed where combinations of the abrasive particle size, the particle size distribution, the flow velocity, etc., are sought to maximize the efficiency of the process. A genetic algorithm is used to treat this inverse problem, and numerical examples are given to illustrate the overall approach.
引用
收藏
页码:749 / 759
页数:11
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