Determination of the thickness and optical constants of thin films from transmission spectra

被引：40
|
作者：
Kubinyi, M [1 ]
Benko, N [1 ]
Grofcsik, A [1 ]
Jones, WJ [1 ]
机构：
[1] UNIV COLL SWANSEA, DEPT CHEM, SWANSEA SA2 8PP, W GLAM, WALES
来源：
THIN SOLID FILMS | 1996年 / 286卷 / 1-2期
基金：
匈牙利科学研究基金会; 英国工程与自然科学研究理事会;
关键词：
amorphous materials; optical properties; optical spectroscopy; silicon;
D O I：
10.1016/S0040-6090(96)08737-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A method has been developed to determine the thickness and the wavelength-dependent refractive indices and absorption coefficients of thin optical films by fitting a five parameter function to measured transmission spectra. Initial values for the fitting parameter are obtained from the transmission values at the spectral maxima and minima of the interference patterns created by the films. This is followed by a systematic variation of those parameters which can cause a failure of the calculation by reaching local minima of The residual sum of squares. The final fitting is performed with a Marquardt algorithm. A Monte Carlo simulation has indicated that the accuracy of this method is at least one order of magnitude better than that of the methods utilising only the interference extrema.
引用
收藏
页码：164 / 169
页数：6
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