Determination of the thickness and optical constants of thin films from transmission spectra

被引：40
|
作者：
Kubinyi, M [1 ]
Benko, N [1 ]
Grofcsik, A [1 ]
Jones, WJ [1 ]
机构：
[1] UNIV COLL SWANSEA, DEPT CHEM, SWANSEA SA2 8PP, W GLAM, WALES
来源：
THIN SOLID FILMS | 1996年 / 286卷 / 1-2期
基金：
匈牙利科学研究基金会; 英国工程与自然科学研究理事会;
关键词：
amorphous materials; optical properties; optical spectroscopy; silicon;
D O I：
10.1016/S0040-6090(96)08737-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A method has been developed to determine the thickness and the wavelength-dependent refractive indices and absorption coefficients of thin optical films by fitting a five parameter function to measured transmission spectra. Initial values for the fitting parameter are obtained from the transmission values at the spectral maxima and minima of the interference patterns created by the films. This is followed by a systematic variation of those parameters which can cause a failure of the calculation by reaching local minima of The residual sum of squares. The final fitting is performed with a Marquardt algorithm. A Monte Carlo simulation has indicated that the accuracy of this method is at least one order of magnitude better than that of the methods utilising only the interference extrema.
引用
收藏
页码：164 / 169
页数：6
相关论文
共 50 条
  • [1] DETERMINATION OF OPTICAL-CONSTANTS AND AVERAGE THICKNESS OF INHOMOGENEOUS-ROUGH THIN-FILMS USING SPECTRAL DEPENDENCE OF OPTICAL TRANSMITTANCE
    NOWAK, M
    THIN SOLID FILMS, 1995, 254 (1-2) : 200 - 210
  • [2] Theoretical Model for Determining the Thickness and Optical Constants of Transparent Conducting Oxide Thin Films From the Measured Reflectance Spectra
    Basnet, Bijaya
    Nepal, Mahesh
    Thapa, Gaurab J.
    Kafle, Madhav
    Kharel, Ram P.
    Karkee, Rijan
    Dhakal, Tara P.
    Kafle, Bhim P.
    SURFACE AND INTERFACE ANALYSIS, 2025, 57 (01) : 16 - 27
  • [3] A method for determining thickness and optical constants of absorbing thin films
    Pekker, D
    Pekker, L
    THIN SOLID FILMS, 2003, 425 (1-2) : 203 - 209
  • [4] Determination of optical constants and average thickness of thin films on thick substrates using angular distribution of intensity of reflected radiation
    Jaglarz, J
    Nowak, M
    THIN SOLID FILMS, 1996, 278 (1-2) : 124 - 128
  • [5] Optical properties of amorphous HF-In-Zn-O thin films estimated from transmission spectra
    Shin, Flyun Joon
    Kang, Se-Jun
    Baik, Jae Yoon
    Lee, Ik-Jae
    Singh, Palwinder
    Thakur, Anup
    JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 2015, 80 : 7 - 10
  • [6] Measurement of the thickness distribution and optical constants of non-uniform thin films
    Ohlidal, M.
    Ohlidal, I.
    Klapetek, P.
    Necas, D.
    Majumdar, A.
    MEASUREMENT SCIENCE AND TECHNOLOGY, 2011, 22 (08)
  • [7] Use of artificial neural networks to predict thickness and optical constants of thin films from reflectance data
    Tabet, MF
    McGahan, WA
    THIN SOLID FILMS, 2000, 370 (1-2) : 122 - 127
  • [8] Determination and analysis of optical constants for thermally evaporated PbSe thin films
    El-Shazly, E. A. A.
    Zedan, I. T.
    Abd El-Rahman, K. F.
    VACUUM, 2011, 86 (03) : 318 - 323
  • [9] Comparison of optical constants and average thickness of inhomogeneous rough thin films obtained from special dependences of optical transmittance and reflectance
    Kepinska, M
    Nowak, M
    NDT & E INTERNATIONAL, 1998, 31 (02) : 105 - 110
  • [10] Determination of Optical Constants of Thin Films in Extreme Ultraviolet Wavelength Region by an Indirect Optical Method
    Kang, Hee Young
    Lim, Jai Dong
    Peranantham, Pazhanisami
    Hwangbo, Chang Kwon
    JOURNAL OF THE OPTICAL SOCIETY OF KOREA, 2013, 17 (01) : 38 - 43
12345