Development of Infrared FPA Using Bimaterial Microcantilever Arrays

被引：2
作者：
JIn, Yufeng [1 ]
Yu, Xiaomei [1 ]
Zheng, Yongjun [1 ]
Zhao, Yuejin [2 ]
Liu, Xiaohua [2 ]
Dong, Liquan [2 ]
机构：
[1] Peking Univ, Beijing 100871, Peoples R China
[2] Beijing Inst Technol, Beijing, Peoples R China
来源：
INTERNATIONAL SYMPOSIUM ON PHOTOELECTRONIC DETECTION AND IMAGING 2011: SENSOR AND MICROMACHINED OPTICAL DEVICE TECHNOLOGIES | 2011年 / 8191卷
关键词：
FPA; bimaterial; microcantilever; NETD; time constant;
D O I：
10.1117/12.898604
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
An optical-readout bimaterial microcantilever-type infrared detector improving both IR absorption and pixel uniformity is proposed. A Focal Plane Array (FPA) of 128x128 pixels was fabricated using 4-inch silicon Micro-Electro Mechanical System (MEMS) processes. The FPA design and process development are discussed and the Scanning Electron Microscope (SEM) photos and imaging results of the FPA are presented. The Noise Equivalent Temperature Difference (NETD) of the proposed device was measured to be 200mK by a gray level change method and the time constant was calculated to be similar to 15 ms under a 10 mTorr pressure.
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页数：4
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