In order to clarify the formation process of L1(0) Fe-Pt ordered phase in Fe (t(Fe))/Pt (t(Pt)) multilayers, we have evaluated the activation energy of ordering (Q(S)) and of atomic interdiffusion at Fe/Pt interfaces (Q(D)). Q(S) for the multilayers takes a minimum value of similar to0.7 eV when t(Fe)=t(Pt), much lower than that of Fe-Pt disordered alloy films (1.2 eV). This value is almost the same with the activation energy Q(D) of atomic interdiffusion at Fe/Pt interfaces. From these results, it is concluded that the interdiffusion at Fe/Pt interfaces which occurs at relatively low temperature dominates the formation process of L1(0) Fe-Pt in Fe/Pt multilayers. (C) 2003 American Institute of Physics.