Influence of annealing on the optical, structural and electrical properties of ZnO:Al/Ag/ZnO:Al multilayer stack structures

被引:2
|
作者
Lovchinov, K. [1 ]
Petrov, M. [1 ]
Angelov, O. [1 ]
Nichev, H. [1 ]
Karashanova, D. [2 ]
Dimova-Malinovska, D. [1 ]
机构
[1] Bulgarian Acad Sci, Cent Lab Solar Energy & New Energy Sources, 72 Tsarigradsko Chaussee, BU-1784 Sofia, Bulgaria
[2] Bulgarian Acad Sci, Acad J Malinowski Inst Opt Mat & Technol, BU-1113 Sofia, Bulgaria
来源
18TH INTERNATIONAL SUMMER SCHOOL ON VACUUM, ELECTRON AND ION TECHNOLOGIES (VEIT2013) | 2014年 / 514卷
关键词
D O I
10.1088/1742-6596/514/1/012012
中图分类号
O59 [应用物理学];
学科分类号
摘要
Multilayer stack structures ZnO:Al(20 nm)/Ag(x)/ZnO:Al(20 nm) with different thickness of the middle Ag(x) layer - x = 6 nm, 10 nm, 12 nm, 16 nm and 20 nm, were prepared by r.f. magnetron sputtering. The ZnO: Al and Ag layers were deposited by magnetron sputtering on glass substrates without heating. The two-layer structures ZnO: Al(20)/Ag(x) were annealed in N-2 + H-2 at 180 degrees C, 50 min., and then capped by the top ZnO: Al(20 nm) layer. The optical, structural and electrical properties were studied of the as-deposited and of the annealed three-layer stacks. The TEM, SEM and AFM analyses demonstrated changes of the stack structure with the Ag film thickness and after annealing. The transmittance and reflectance spectra revealed bands of Ag electrons plasma oscillations and inter-band d-shell Ag electrons which were red-shifted after annealing. The as-deposited structures had low resistivity (1x10(-3) to 4x10(-5) Omega cm), which decreased with the thickness of the Ag film due to the change in the carrier transport mechanisms. The value of the resistivity increased after annealing.
引用
收藏
页数:5
相关论文
共 50 条
  • [41] Dependence of structural, electrical, and optical properties of ZnO:Al films on substrate temperature
    Chen, M
    Pei, ZL
    Wang, X
    Sun, C
    Wen, LS
    JOURNAL OF MATERIALS RESEARCH, 2001, 16 (07) : 2118 - 2123
  • [42] Structural, optical and electrical properties of ZnO:Al thin films for optoelectronic applications
    Youssef Ammaih
    Abderrazak Lfakir
    Bouchaib Hartiti
    Abderraouf Ridah
    Philippe Thevenin
    Meryane Siadat
    Optical and Quantum Electronics, 2014, 46 : 229 - 234
  • [43] Structural, optical and electrical properties of ZnO:Al thin films for optoelectronic applications
    Ammaih, Youssef
    Lfakir, Abderrazak
    Hartiti, Bouchaib
    Ridah, Abderraouf
    Thevenin, Philippe
    Siadat, Meryane
    OPTICAL AND QUANTUM ELECTRONICS, 2014, 46 (01) : 229 - 234
  • [44] Correlation of structural, electrical and optical properties of Al-doped ZnO TCOs
    Singh, Rajan
    Mukherjee, S. K.
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2022, 33 (09) : 6969 - 6980
  • [45] Influence of Al concentration on structural and optical properties of Al-doped ZnO thin films
    Deniz Kadir Takci
    Ebru Senadim Tuzemen
    Kamuran Kara
    Sadi Yilmaz
    Ramazan Esen
    Ozge Baglayan
    Journal of Materials Science: Materials in Electronics, 2014, 25 : 2078 - 2085
  • [46] Influence of Al concentration on structural and optical properties of Al-doped ZnO thin films
    Takci, Deniz Kadir
    Tuzemen, Ebru Senadim
    Kara, Kamuran
    Yilmaz, Sadi
    Esen, Ramazan
    Baglayan, Ozge
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2014, 25 (05) : 2078 - 2085
  • [47] Optical properties of ZnO/Al/ZnO multilayer films for large area transparent electrodes
    Soboyejo, Winston Oluwole, 1600, Cambridge University Press (30):
  • [48] Effect of Surface Plasmons on Optical and Electrical Properties of Multilayer ZnO/Ag/ZnO Thin Film
    Venugopal, N.
    Varma, G. D.
    Mitra, Anirban
    OPTICS: PHENOMENA, MATERIALS, DEVICES, AND CHARACTERIZATION: OPTICS 2011: INTERNATIONAL CONFERENCE ON LIGHT, 2011, 1391
  • [49] Influence of Al impurities on the electrical properties of ZnO films
    Rembeza, S., I
    Prosvetov, R. E.
    Rembeza, E. S.
    Vinokurov, A. A.
    Makagonov, V. A.
    Agapov, B. L.
    LETTERS ON MATERIALS, 2019, 9 (03): : 288 - 293
  • [50] Optical properties of ZnO/Al/ZnO multilayer films for large area transparent electrodes
    Egidius Rutatizibwa Rwenyagila
    Benjamin Agyei-Tuffour
    Martiale Gaetan Zebaze Kana
    Omololu Akin-Ojo
    Winston Oluwole Soboyejo
    Journal of Materials Research, 2014, 29 : 2912 - 2920