Computer design of electrostatic systems of charge particle optics: Systems with spherical electrodes and a fine-structure grid

被引：2

作者：

Bad'in, L. V. ^{[1
]}

Demin, S. K. ^{[1
]}

Safronov, S. I. ^{[1
]}

Tarasov, R. P. ^{[1
]}

机构：

[1] Dukhov All Russia Res Inst Automat, Moscow 127055, Russia

来源：

TECHNICAL PHYSICS | 2011年 / 56卷 / 08期

关键词：

SOURCE IMAGE STRUCTURE; NUMERICAL-ANALYSIS;

D O I：

10.1134/S1063784211080032

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Problems in computer-aided design of 3D optical systems for charged particle optics are analyzed. The results of simulation of electron-optical systems of optoelectronic transducers with two cathode packs (spherical cathode-plane fine-structure grid as the accelerating electrode and plane cathode-spherical fine-structure grid) are considered. We note a low technological efficiency of such structures and unsatisfactory quality (as it regards some parameters) of the image being recorded due to spherical electrodes and a fine-structure grid in the cathode pack. Numerical analysis of the effect of adjustment of the design on the quality of the image being recorded is carried out.

引用

页码：1158 / 1166

页数：9

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