Fully Differential Single Resonator FM Gyroscope Using CW/CCW Mode Separator

被引：52

作者：

Tsukamoto, Takashiro ^{[1
]}

Tanaka, Shuji ^{[1
]}

机构：

[1] Tohoku Univ, Dept Robot, Sendai, Miyagi 9808579, Japan

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2018年 / 27卷 / 06期

关键词：

FM Gyroscope; CW/CCW-mode separator; mode-matched MEMS resonator; mismatch compensation; FREQUENCY;

D O I：

10.1109/JMEMS.2018.2874060

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a fully differential frequency modulated (FM) gyroscope where the superposed clockwise (CW) and counter clockwise (CCW) modes are independently controlled on a single resonator. The CW and CCW mode detectors were developed to control both modes simultaneously on the resonator. A frequency and quality factor mismatch compensation method was developed to perfectly orthogonalize these two modes. A FM gyroscope operation with excellent linearity between applied angular rate and frequency difference was demonstrated. The temperature coefficient of scale factor was as small as -52 +/- 136 ppm/degrees C. The scale factor and bias were stable over 700 hours with the drift less than 0.062 +/- 0.100 ppm/hr and 31 +/- 121 ppm/hr, respectively.

引用

页码：985 / 994

页数：10

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