Optical properties and electrical properties of heavily Al-doped ZnSe layers

被引:1
作者
Oh, D. C. [1 ,5 ]
Takai, T. [1 ]
Im, I. H. [1 ]
Park, S. H. [1 ]
Hanada, T. [1 ]
Yao, T. [1 ,6 ]
Song, J. S. [2 ]
Chang, J. H. [3 ]
Makino, H. [4 ]
Han, C. S. [5 ]
Koo, K. H. [5 ]
机构
[1] Tohoku Univ, Mat Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan
[2] NeosemiTech Corp, Seo Ku, Inchon 404310, South Korea
[3] Korea Maritime Univ, Dept Semicond Phys, Youngdo Ku, Pusan 606791, South Korea
[4] Kochi Univ Technol, Res Inst, Mat Design Ctr, Kochi 7828502, Japan
[5] Hoseo Univ, Dept Def Sci & Technol, Asan 336795, Asan, South Korea
[6] Tohoku Univ, Interdisciplinary Res Ctr, Aoba Ku, Sendai, Miyagi 9808578, Japan
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2008年 / 26卷 / 02期
基金
新加坡国家研究基金会;
关键词
D O I
10.1116/1.2836404
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We have investigated optical properties and electrical properties of electrically degraded ZnSe layers by heavy Al doping, where their electron concentrations lie in the range of 7 X 10(17)-6 X 10(18) cm(-3). Low-temperature photoluminescence exhibits two dominant radiative trap centers of 1.97 eV (RDI) and 2.25 eV (RD2), which are ascribed to V-zn-related complex defects. Deep-level-transient spectroscopy shows two electron-trap centers at 0.16 eV (ND1) and 0.80 eV (ND2) below the conduction-band minimum. On the other hand, it is found that RD2 is dominant in relatively lightly doped ZnSe:Al layers below 7 X 10(18) cm(-3) and RD1 is dominant in more heavily doped layers near 1 X 10(19) cm(-3), while ND1 and ND2 are independent of A1 doping concentration and their trap densities are estimated be below 3 X 10(16) cm(-3). This indicates that RD1 and RD2 cause the carrier compensation in heavily doped ZnSe:Al layers. Their electron transport mechanism can be explained by ionized-impurity scattering mechanism. (C) 2008 American, Vacuum Society.
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页码:259 / 264
页数:6
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