Investigation of yellow luminescence intensity of N-polar unintentionally doped GaN

被引:5
作者
Du Da-Chao [1 ]
Zhang Jin-Cheng [1 ]
Ou Xin-Xiu [1 ]
Wang Hao [1 ]
Chen Ke [1 ]
Xue Jun-Shuai [1 ]
Xu Sheng-Rui [1 ]
Hao Yue [1 ]
机构
[1] Xidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond & Devices, Xian 710071, Peoples R China
基金
中国国家自然科学基金;
关键词
N-polar GaN; yellow luminescence; KOH etching; CHEMICAL-VAPOR-DEPOSITION; C-PLANE SAPPHIRE; GALLIUM VACANCIES; EPITAXY; FACE; SUBSTRATE; GROWTH; FILMS;
D O I
10.1088/1674-1056/20/3/037805
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
This paper reports that the yellow luminescence intensity of N-polar GaN Epi-layers is much lower than that of Ga-polar ones due to the inverse polarity, and reduces drastically in the N-polar unintentionally-doped GaN after etching in KOH solution. The ratio of yellow luminescence intensity to band-edge emission intensity decreases sharply with the etching time. The full width at half maximum of x-ray diffraction of (10-12) plane falls sharply after etching, and the surface morphology characterized by scanning electron microscope shows a rough surface that changes with the etching time. The mechanism for the generation of the yellow luminescence are explained in details.
引用
收藏
页数:5
相关论文
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