UV assisted rapid thermal processing of strontium bismuth tantalate (SBT) thin films

被引：0
|
作者：
O'Brien, S [1 ]
Hurley, PK [1 ]
Crean, GM [1 ]
Johnson, J [1 ]
Caputa, C [1 ]
Wouters, D [1 ]
机构：
[1] Univ Coll Cork, Cork, Ireland
来源：
Materials and Processes for Nonvolatile Memories | 2005年 / 830卷
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D O I：
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中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A novel technique termed UV-assisted RTP has been developed and found to offer improvement in material properties, in particular when applied to thin films. Regarding crystallization of SBT, a number of UV-RTP strategies were developed and evaluated. It was demonstrated that UV irradiation of the sample material at a temperature in excess of the MOCVD deposition temperature was found to produce a significant increase in P-r.
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页码：177 / 181
页数：5
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