Tensile strength of gold nanointerconnects without the influence of strain gradients

被引:23
作者
Olliges, Sven
Gruber, Patric A.
Auzelyte, Vaida
Ekinci, Yasin
Solak, Harun H.
Spolenak, Ralph
机构
[1] ETH, Dept Mat, Lab Nanomet, CH-8093 Zurich, Switzerland
[2] Univ Stuttgart, Inst Metallkunde, D-70569 Stuttgart, Germany
[3] Paul Scherrer Inst, Lab Micro & Nanotechnol, CH-5232 Villigen, Switzerland
关键词
lithography; tension test; X-ray diffraction; nanocrystalline materials; plastic deformation; MECHANICAL-PROPERTIES; PLASTIC-DEFORMATION; SCALE; FILMS; BAUSCHINGER; DEPENDENCE; PATTERNS; STRESS;
D O I
10.1016/j.actamat.2007.05.039
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Gold is an ideal material for wires and electrodes on the nanoscale because of its corrosion resistance and biocompatibility. For system integration the mechanical properties of gold nanowires are highly important. In this paper, a study on the deformation behavior of parallel line arrays of gold on polyimide substrates is presented. Arrays of 45-60 nm nanolines were produced by extreme ultraviolet interference lithography, evaporation of gold and a subsequent lift-off process. Tensile testing of these samples was performed by using an in situ synchrotron-based technique, which allows for the fast acquisition of diffraction peaks. The samples show yield stresses of about 400 MPa. This is comparable to thin films of similar thickness, but significantly lower than previously reported results on single electrodeposited wires deformed in bending. The differences are explained in terms of strain gradient plasticity theory. (C) 2007 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
引用
收藏
页码:5201 / 5210
页数:10
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