A nanoparticle-based microsensor for room temperature hydrogen detection

被引：0

作者：

Rajnikant, A ^{[1
]}

Shukla, S ^{[1
]}

Ludwig, L ^{[1
]}

Anjum, M ^{[1
]}

Cho, HJ ^{[1
]}

Seal, S ^{[1
]}

机构：

[1] Univ Cent Florida, Orlando, FL 32816 USA

来源：

PROCEEDINGS OF THE IEEE SENSORS 2004, VOLS 1-3 | 2004年

关键词：

hydrogen sensor; microsensor; nanoparticle;

D O I：

10.1109/ICSENS.2004.1426182

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this work, we report a novel micromachined hydrogen sensor operating at room temperature. The sensor has been successfully designed and fabricated based on interdigitated conductometric microelectrodes integrating indium oxide (In2O3)-doped tin oxide (SnO2) semiconductor nanocrystalline particles with platinum (Pt) nanoclusters. Very high H, sensitivity (110 x10(3)) with fast response and recovery has been observed for the present sensor at room temperature and low hydrogen gas concentration. The nanomaterial/microdevice integration for a highly efficient sensor device with unprecedented functions has been explored and investigated systematically.

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收藏

页码：395 / 398

页数：4

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