Depth-resolved local atomic structure of Fe/Cr multilayer film with GMR effect: Experimental results

A subnanometric resolution method for studying the local atomic structure of interface and surface of low contrast multilayered nanoheterostructure thin films is applied to the Fe/Cr multilayer sample with GMR (Giant Magnetoresistance) effect. We consider combination of the X-ray reflectivity (XRR) and the Extended X-ray absorption Fine Structure (EXAFS) spectroscopy with angular resolution. The XRR experiment has been carried out according to standard procedure using a specialized X-ray diffractometer "Empyrean" at the Institute of Metal Physics (Ekaterinburg). We have applied a measurement method proposed earlier by V. P. Romanov et al. This approach allowed us to separate the diffuse and pure specular contributions. To determine the concentration depth-profile of element from XRR data, we have implemented the Levenberg-Marquardt (L-M) algorithm for nonlinear inverse problem. Thus, the phase problem for X-ray specular reflectivity has been solving. The EXAFS measurements has been performed using synchrotron facilities (National Research Centre "Kurchatov Institute"). {The Fe and Cr K absorption spectra} were recorded in fluorescence mode with angular resolution. The experimental results for depth-resolved local atomic structure of Fe/Cr multilayer with GMR effect has been obtained. A depth resolution of 2-3 angstrom was reached. Atomic structure of Fe and Cr atoms located at seven depth points including interface for the Al2O3/Cr(100 angstrom)/[Fe(8 angstrom)/Cr(10,5 angstrom)](2)/Cr(20 angstrom) multilayered sample was obtained. It was shown what chromium oxides were present on the surface of the sample.