Complex (dusty) plasmas:: Examples for applications and observation of magnetroninduced phenomena

被引:33
|
作者
Kersten, H
Thieme, G
Fröhlich, M
Bojic, D
Tung, DH
Quaas, M
Wulff, H
Hippler, R
机构
[1] Inst Nonthermal Plasmaphys, D-17489 Greifswald, Germany
[2] Ernst Moritz Arndt Univ Greifswald, Inst Phys, D-17487 Greifswald, Germany
[3] Ernst Moritz Arndt Univ Greifswald, Inst Chem & Biochem, D-17487 Greifswald, Germany
关键词
dusty plasma; plasma-particle interaction; magnetron sputtering; plasma diagnostics; luminescent particles; thin film deposition;
D O I
10.1351/pac200577020415
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Low-pressure plasmas offer a unique possibility of confinement, control, and fine tailoring of particle properties. Hence, dusty plasmas have grown into a vast field, and new applications of plasma-processed dust particles are emerging. During the deposition of thin amorphous films onto melamine formaldehyde (MF) microparticles in a C2H2 plasma, the generation of nanosized carbon particles was also studied. The size distribution of those particles is quite uniform. In another experiment, the stability of luminophore grains could be improved by coating with protective Al2O3 films that are deposited by a plasma-enhanced chemical vapor deposition (PECVD) process using a metal-organic precursor gas. Coating of SiO2 microparticles with thin metal layers by magnetron sputtering is also described. Especially the interaction of the microsized grains confined in a radio frequency (rf) plasma with the do magnetron discharge during deposition was investigated. The observations emphasize that the interaction between magnetron plasma and injected microdisperse powder particles can also be used as a diagnostic tool for the characterization of magnetron sputter sources.
引用
收藏
页码:415 / 428
页数:14
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