Nanocrystalline structure of WO3 thin films prepared by the sol-gel technique

被引:38
作者
Pyper, O
Schollhorn, R
Donkers, JJTM
Krings, LHM
机构
[1] Tech Univ Berlin, Inst Anorgan & Analyt Chem, D-10623 Berlin, Germany
[2] Philips Ctr Mfg Technol, NL-5656 AA Eindhoven, Netherlands
[3] Philips Res, NL-5656 AA Eindhoven, Netherlands
关键词
thin films; oxides; sol-gel chemistry; electron microscopy; microstructure;
D O I
10.1016/S0025-5408(98)00080-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Using high-resolution transmission electron microscopy, it was established that WO3 thin films (d = 190 nm) prepared by the sol-gel method exhibit a nanocrystalline ReO3-type structure already at curing temperatures not exceeding 180 degrees C. Electron diffraction studies showed no additional crystalline or amorphous hydrated phases WO3 . nH(2)O in samples obtained at this temperature. This result is important with respect to the kinetic behavior and aging properties of electrochromic devices. As detected by X-ray diffraction, a crystalline phase appeared when the thin films were heated at 325 degrees C for 1 h. A comparison of the electron diffraction pattern of the latter with the one of the materials cured at 180 degrees C showed growth of the crystals in size, but no changes in structure or ordering. (C) 1998 Elsevier Science Ltd.
引用
收藏
页码:1095 / 1101
页数:7
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