Multidimensional fluid-particle modelling technique in low-temperature argon plasma at low pressure

被引:5
作者
Bartos, Petr [1 ]
Hrach, Rudolf [1 ]
Jelinek, Petr [1 ]
机构
[1] Charles Univ Prague, Fac Math & Phys, Dept Surface & Plasma Sci, C-18000 Prague, Czech Republic
关键词
fluid particle simulations; plasma sheath; argon plasma;
D O I
10.1016/j.vacuum.2007.07.006
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In the contribution there is presented a new computer modelling technique, which can be used in multidimensional computer simulations of plasma at low pressure. The technique is based on the fluid-particle approach and can be used in the study of the range of physical phenomena, e.g. plasma behaviour in the vicinity of substrates, probe diagnostics, plasma technology, etc. The computer model is useable for the solution of three-dimensional problems and it minimizes the restrictions arising in complicated model geometry. The algorithm has been tested during the study of plasma sheath formation in the vicinity of probes with various geometries immersed into low-temperature argon plasma. Some results of these simulations are presented in the last section. (C) 2007 Elsevier Ltd. All rights reserved.
引用
收藏
页码:220 / 223
页数:4
相关论文
共 12 条
[1]   HYBRID MONTE-CARLO FLUID MODEL OF A DIRECT-CURRENT GLOW-DISCHARGE [J].
BOGAERTS, A ;
GIJBELS, R ;
GOEDHEER, WJ .
JOURNAL OF APPLIED PHYSICS, 1995, 78 (04) :2233-2241
[2]   Hybrid modeling of a capacitively coupled radio frequency glow discharge in argon: Combined Monte Carlo and fluid model [J].
Bogaerts, A ;
Gijbels, R ;
Goedheer, W .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1999, 38 (7B) :4404-4415
[3]   Similarities and differences between direct current and radio-frequency glow discharges: a mathematical simulation [J].
Bogaerts, A ;
Gijbels, R .
JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY, 2000, 15 (09) :1191-1201
[4]   Hybrid modeling network for a helium-argon-copper hollow cathode discharge used for laser applications [J].
Bogaerts, A ;
Gijbels, R .
JOURNAL OF APPLIED PHYSICS, 2002, 92 (11) :6408-6422
[5]   Fluid modeling of electron heating in low-pressure, high-frequency capacitively coupled plasma discharges [J].
Chen, GY ;
Raja, LL .
JOURNAL OF APPLIED PHYSICS, 2004, 96 (11) :6073-6081
[6]  
Ellis H. W., 1976, Atomic Data and Nuclear Data Tables, V17, P177, DOI 10.1016/0092-640X(76)90001-2
[7]   Boundary conditions in fluid models of gas discharges [J].
Hagelaar, GJM ;
de Hoog, FJ ;
Kroesen, GMW .
PHYSICAL REVIEW E, 2000, 62 (01) :1452-1454
[8]   Self-consistent modelling of plasma sheath formation: I. Sheath dynamics in electropositive plasma [J].
Hrach, R ;
Vicher, M .
CZECHOSLOVAK JOURNAL OF PHYSICS, 2001, 51 (06) :557-566
[9]  
Mitchner M., 1973, PARTIALLY IONIZED GA
[10]   A 2-DIMENSIONAL FLUID MODEL FOR AN ARGON RF DISCHARGE [J].
PASSCHIER, JDP ;
GOEDHEER, WJ .
JOURNAL OF APPLIED PHYSICS, 1993, 74 (06) :3744-3751