Cooperative Carbon Nanotube Nanomanipulation For Field Effect Transistor

In this paper, based on the operating environment of scanning electron microscope (SEM), the cooperative control of carbon nanotubes by controlling multi-operator hand was realized by controlling the robot operator with multiple degrees of freedom. Firstly, the carbon nanotube was picked up from the bulk by the nano manipulations. Then the nanotube was transferred on the surface of the metal electrode of the chip using the two nano manipulations and fixed on by electron beam induced deposition (EBID). In this robotics manipulation system, operation and assembly of carbon nanotube were successfully realized. The voltage-current property of the carbon nanotube was also evaluated in the SEM