Microchannel Fabrication on Glass Materials for Microfluidic Devices

被引:74
作者
Hwang, Jihong [1 ]
Cho, Young Hak [1 ]
Park, Min Soo [1 ]
Kim, Bo Hyun [2 ]
机构
[1] Seoul Natl Univ Sci & Technol, Dept Mech Syst Design Engn, 232 Gongneung Ro, Seoul 01811, South Korea
[2] Soongsil Univ, Sch Mech Engn, 369 Sangdo Ro, Seoul 06978, South Korea
基金
新加坡国家研究基金会;
关键词
Microchannel; Microfluidic device; Glass; BOROSILICATE GLASS; PYREX GLASS; SILICA GLASS; FUSED-SILICA; SURFACE-ROUGHNESS; MICROLENS ARRAYS; LASER; MICROSTRUCTURES; TECHNOLOGY; BRITTLE;
D O I
10.1007/s12541-019-00103-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Microchannels are the main features that characterize microfluidic devices. Also, glass is given priority in selecting a substrate material in the development of microfluidic devices due to its high degree of transparency, high chemical resistance, inertness to most substances, ability to sustain higher temperature, biological compatibility, and relatively low non-specific adsorption. However, the high cost and time-consuming labor for fabricating microchannels on glass limit the development of glass-based microfluidic devices, especially for point-of-care test devices. Therefore, it is important to have a capability for fabricating microchannels on glass more efficiently. In this context, the present paper reviews the processes applicable for fabricating microchannels on glass, which include chemical, mechanical, laser-based, and other processes. The state of the art for these processes, and their advantages and limits are also addressed, which will guide in selecting the processes suitable for constructing glass-based microfluidic devices.
引用
收藏
页码:479 / 495
页数:17
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