Microchannel Fabrication on Glass Materials for Microfluidic Devices

被引:120
作者
Hwang, Jihong [1 ]
Cho, Young Hak [1 ]
Park, Min Soo [1 ]
Kim, Bo Hyun [2 ]
机构
[1] Seoul Natl Univ Sci & Technol, Dept Mech Syst Design Engn, 232 Gongneung Ro, Seoul 01811, South Korea
[2] Soongsil Univ, Sch Mech Engn, 369 Sangdo Ro, Seoul 06978, South Korea
基金
新加坡国家研究基金会;
关键词
Microchannel; Microfluidic device; Glass; BOROSILICATE GLASS; PYREX GLASS; SILICA GLASS; FUSED-SILICA; SURFACE-ROUGHNESS; MICROLENS ARRAYS; LASER; MICROSTRUCTURES; TECHNOLOGY; BRITTLE;
D O I
10.1007/s12541-019-00103-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Microchannels are the main features that characterize microfluidic devices. Also, glass is given priority in selecting a substrate material in the development of microfluidic devices due to its high degree of transparency, high chemical resistance, inertness to most substances, ability to sustain higher temperature, biological compatibility, and relatively low non-specific adsorption. However, the high cost and time-consuming labor for fabricating microchannels on glass limit the development of glass-based microfluidic devices, especially for point-of-care test devices. Therefore, it is important to have a capability for fabricating microchannels on glass more efficiently. In this context, the present paper reviews the processes applicable for fabricating microchannels on glass, which include chemical, mechanical, laser-based, and other processes. The state of the art for these processes, and their advantages and limits are also addressed, which will guide in selecting the processes suitable for constructing glass-based microfluidic devices.
引用
收藏
页码:479 / 495
页数:17
相关论文
共 50 条
[21]   Laser micromachining on PMMA: an efficient fabrication of microchannels for sustainable microfluidic devices [J].
Srikantaprasad, Guruprasad ;
Mathew, Nithin Tom ;
Nagar, Sreekanth Vasudev .
JOURNAL OF THE BRAZILIAN SOCIETY OF MECHANICAL SCIENCES AND ENGINEERING, 2024, 46 (05)
[22]   Fabrication of All Glass Bifurcation Microfluidic Chip for Blood Plasma Separation [J].
Jang, Hyungjun ;
Haq, Muhammad Refatul ;
Ju, Jonghyun ;
Kim, Youngkyu ;
Kim, Seok-min ;
Lim, Jiseok .
MICROMACHINES, 2017, 8 (03)
[23]   Embedded Double-Layered Microchannel Fabrication for Microfluidic Devices Using Developer Permeability of Negative Thick-Film Resists [J].
Hirai, Y. ;
Nakai, Y. ;
Sugano, K. ;
Tsuchiya, T. ;
Tabata, O. .
EUROSENSORS XXIV CONFERENCE, 2010, 5 :854-857
[24]   Glass based micro total analysis systems: Materials, fabrication methods, and applications [J].
Tang, Tao ;
Yuan, Yapeng ;
Yalikun, Yaxiaer ;
Hosokawa, Yoichiroh ;
Li, Ming ;
Tanaka, Yo .
SENSORS AND ACTUATORS B-CHEMICAL, 2021, 339
[25]   Characterization of glass frit capillary pumps for microfluidic devices [J].
Matthew Rich ;
Omar Mohd ;
Frances S. Ligler ;
Glenn M. Walker .
Microfluidics and Nanofluidics, 2019, 23
[26]   Characterization of glass frit capillary pumps for microfluidic devices [J].
Rich, Matthew ;
Mohd, Omar ;
Ligler, Frances S. ;
Walker, Glenn M. .
MICROFLUIDICS AND NANOFLUIDICS, 2019, 23 (05)
[27]   Low-Cost Rapid Prototyping of Whole-Glass Microfluidic Devices [J].
Yuen, Po Ki ;
Goral, Vasiliy N. .
JOURNAL OF CHEMICAL EDUCATION, 2012, 89 (10) :1288-1292
[28]   Fabrication of all glass microfluidic device with superior chemical and mechanical resistances by glass molding with vitreous carbon mold [J].
Haq, Muhammad Refatul ;
Kim, Young Kyu ;
Kim, Jun ;
Ju, Jonghyun ;
Kim, Seok-min .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2019, 29 (07)
[29]   Fabrication of nanofluidic devices in glass with polysilicon electrodes [J].
Kutchoukov, VG ;
Pakula, L ;
Parikesit, GOF ;
Garini, Y ;
Nanver, LK ;
Bossche, A .
SENSORS AND ACTUATORS A-PHYSICAL, 2005, 123-24 :602-607
[30]   Electrostatic bonding of a silicon master to a glass wafer for plastic microchannel fabrication [J].
Liu, Jun-Shan ;
Liu, Chong ;
Guo, Ji-Hong ;
Wang, Li-Ding .
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2006, 178 (1-3) :278-282