Surface smoothing of rough amorphous films by irradiation-induced viscous flow

被引：88

作者：

Mayr, SG ^{[1
]}

Averback, RS ^{[1
]}

机构：

[1] Univ Illinois, Dept Mat Sci & Engn, Urbana, IL 61801 USA

来源：

PHYSICAL REVIEW LETTERS | 2001年 / 87卷 / 19期

关键词：

D O I：

10.1103/PhysRevLett.87.196106

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Surface roughening and smoothing reactions on vapor codeposited glassy Zr65Al7.5Cu27.5 films by 1.8 MeV Kr+ ion beam irradiation is investigated. Irradiation causes significant smoothing of initially rough surfaces, and nearly atomically smooth films can be achieved. Smooth surfaces roughen at high doses and long wavelengths. By a Fourier analysis, radiation-induced viscous flow is identified as the dominant surface relaxation mechanism. Two noise terms are identified, which operate on different length scales: One is due to sputtering and the other to thermal spikes. The irradiation-induced viscosity is compared with radiation-enhanced diffusion.

引用

页数：4

共 23 条

[1]

Averback RS, 1998, SOLID STATE PHYS, V51, P281

[2] RADIATION-ENHANCED DIFFUSION IN AMORPHOUS NI-ZR ALLOYS [J].

AVERBACK, RS ;

HAHN, H .

PHYSICAL REVIEW B, 1988, 37 (17) :10383-10386

[3]

Barabasi A-Ls, 1995, FRACTAL CONCEPTS SUR, DOI [10.1017/CBO9780511599798, DOI 10.1017/CBO9780511599798]

[4] Plastic flow induced by single ion impacts on gold [J].

Birtcher, RC ;

Donnelly, SE .

PHYSICAL REVIEW LETTERS, 1996, 77 (21) :4374-4377

[5] ROUGHENING INSTABILITY AND EVOLUTION OF THE GE(001) SURFACE DURING ION SPUTTERING [J].

CHASON, E ;

MAYER, TM ;

KELLERMAN, BK ;

MCILROY, DT ;

HOWARD, AJ .

PHYSICAL REVIEW LETTERS, 1994, 72 (19) :3040-3043

[6] THE SURFACE STATISTICS OF A GRANULAR AGGREGATE [J].

EDWARDS, SF ;

WILKINSON, DR .

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 1982, 381 (1780) :17-31

[7] EFFECT OF VISCOUS-FLOW ON ION DAMAGE NEAR SOLID-SURFACES [J].

GHALY, M ;

AVERBACK, RS .

PHYSICAL REVIEW LETTERS, 1994, 72 (03) :364-367

[8] EFFECT OF CHANGE OF SCALE ON SINTERING PHENOMENA [J].

HERRING, C .

JOURNAL OF APPLIED PHYSICS, 1950, 21 (04) :301-303

[9] Nanoscale pattern formation in Pt thin films due to ion-beam-induced dewetting [J].

Hu, XY ;

Cahill, DG ;

Averback, RS .

APPLIED PHYSICS LETTERS, 2000, 76 (22) :3215-3217

[10] STABILITY AND TRANSFORMATION TO CRYSTALLINE PHASES OF AMORPHOUS ZR-AL-CU ALLOYS WITH SIGNIFICANT SUPERCOOLED LIQUID REGION [J].

INOUE, A ;

KAWASE, D ;

TSAI, AP ;

ZHANG, T ;

MASUMOTO, T .

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1994, 178 (1-2) :255-263

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