Vibration analysis of MEMS vibrating mesh atomizer

Vibrating mesh atomizers (VMAs) are increasing in demand for various applications that require high quality droplet size distribution of aerosols. However, manufacturing limitations of metallic mesh atomizers have prevented researchers from investigating the dynamics and vibration analysis required to further enhance performance. Newly developed MEMS based VMAs allow these devices to be custom designed including varying aperture size, shape, and pitch as well as varying membrane dimensions. In this paper, a systematic vibration analysis of silicon-based MEMS based VMA was investigated to better understand the mechanisms of the atomization process and atomization rate. The MEMS atomizer consists of a microfabricated mesh on silicon membrane coupled with piezoelectric ring. The atomization process with this device is intricate to model due to combination of fluid transfer and dynamics of the membrane actuated by the piezoelectric ring. This paper uses multiphysics finite element modeling validated by experimental analysis to better understand the dynamics of the membrane and key parameters that affect the vibration analysis and atomization process. Resonance frequency, displacement, velocity, and mode shapes of the various dynamic modes of the atomizer were studied using finite element analysis and compared with the experimental results to validate the model. The results demonstrate a strong correlation between the modeled and experimental results of the resonant frequencies and atomization rates. The results can be used to design VMAs with enhanced performance for specific applications in the future.