Composite polymer core-silica shell abrasives: The effect of the shape of the silica particles on oxide CMP

被引：26

作者：

Armini, S. ^{[1
,2
]}

Whelan, C. M. ^{[1
]}

Moinpour, M. ^{[3
]}

Maex, K. ^{[2
]}

机构：

[1] IMEC, B-3001 Louvain, Belgium

[2] Katholieke Univ Leuven, Dept Elect Engn, B-3001 Heverlee, Belgium

[3] Intel Corp, Santa Clara, CA 95052 USA

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 2008年 / 155卷 / 06期

关键词：

D O I：

10.1149/1.2901864

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

We use oxide chemical mechanical planarization (CMP) as a convenient test vehicle for comparing the material removal rate and defectivity induced by different silica abrasives. The effect of particle shape is investigated by comparing fumed and colloidal silica. In particular, the effect of a polymer core on the behavior of a composite abrasive is explored. Overall, fewer and shallower scratches are detected for the composites with a colloidal silica shell as compared with colloidal silica, as well as composites with a fumed silica shell. It is difficult to control the shape and dimension of the fumed silica and fumed silica-based composite agglomerates. Both the length and depth of microscratches increase with particle size and irregularity. Under the same pH conditions, fumed silica and fumed silica-coated abrasives lead to a comparable scratch depth. Fumed silica exhibits agglomerates of greater hardness but higher overall particle stability with respect to its composites, which show lower hardness and lower overall particle stability. (c) 2008 The Electrochemical Society.

引用

页码：H401 / H406

页数：6

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