Structure and mechanical property of glow discharge polymer

Different glow discharge polymer (GDP) thin-films are prepared at various working pressures and flux ratios of trans-2-butune (T2B) to H-2 by using low-pressure plasma enhanced chemical vapor deposition technology. Hydrogen atomic content and network structure of GDP thin-film are characterized by element analysis and Fourier transform infrared spectrum. The hardness and modulus of GDP coating are measured by nanoindentation. It is found that when working pressure and flux ratio between T2B and H-2 gradually decrease, hydrogen content and sp(3) CH3 groups decrease, sp(2) CH2 and sp(3) CH1,2 groups increase and hardness H and Young's modulus E of GDP coating and the cross-linking degree of carbon network inerease.