Topology optimization of MEMS resonators with target eigenfrequencies and modes

被引:20
作者
Giannini, Daniele [1 ,2 ]
Aage, Niels [3 ]
Braghin, Francesco [1 ]
机构
[1] Politecn Milan, Dept Mech Engn, Via G Masa 1, I-20156 Milano Mi, Italy
[2] Katholieke Univ Leuven, Struct Mech Sect, Dept Civil Engn, Kasteelpk Arenberg 40, B-3001 Leuven, Belgium
[3] Tech Univ Denmark, Ctr Acoust Mech Micro Syst, Dept Mech Engn, Nils Koppels Alle,Bldg 404, DK-2800 Lyngby, Denmark
基金
欧洲研究理事会;
关键词
Topology optimization; MEMS resonators; Target eigenfrequencies; Reduced order models; Minimum length scale; Method of moving asymptotes; DESIGN; HOMOGENIZATION; SHAPE; EIGENVALUES; GYROSCOPE;
D O I
10.1016/j.euromechsol.2021.104352
中图分类号
O3 [力学];
学科分类号
08 ; 0801 ;
摘要
In this paper we present a density based topology optimization approach to the synthesis of industrially relevant MEMS resonators. The methodology addresses general resonators employing suspended proof masses or plates, where the first structural vibration modes are typically of interest and have to match specific target eigenfrequencies. As a significant practical example we consider MEMS gyroscope applications, where target drive and sense eigenfrequencies are prescribed, as well as an adequate distance of spurious modes from the operational frequency range. The 3D dynamics of the structure are analysed through Mindlin shell finite elements and a numerically efficient design procedure is obtained through the use of model order reduction techniques based on the combination of multi-point constraints, static approximations and static reduction. Manufacturability of the optimized designs is ensured by imposing a minimum length scale to the geometric features defining the layout. Using deterministic, gradient-based mathematical programming, the method is applied to the design of both single mass and tuning fork MEMS resonators. It is demonstrated that the proposed methodology is capable of meeting the target frequencies and corresponding modes fulfilling common industrial requirements.
引用
收藏
页数:15
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