An X-ray imaging pixel detector based on scintillator filled pores in a silicon matrix

An X-ray imaging pixel detector has been fabricated and preliminary testing has demonstrated a proof-of-principle. The detector is based on a conventional charge coupled detector (CCD)-imaging detector where a scintillator-filled silicon pore matrix provides enhanced X-ray sensitivity without sacrificing lateral resolution. The scintillator blocks inside the pores provide light guiding of the emitted Visible photons to increase the number of photons detected by the CCD element. Preliminary X-ray measurements demonstrate good lateral resolution although non-uniform filling of the pore matrix results in a pronounced fixed noise pattern. The detector has primary applications in dental imaging but would also be of importance in other imaging techniques where the X-ray absorption length exceeds lateral pixel size. (C) 2001 Elsevier Science B.V. All rights reserved.