Development of Frequency Tunable Fluid Loaded PMUTs

被引：4

作者：

Roy, Kaustav ^{[1
]}

Kalyan, Kritank ^{[2
]}

Ashok, Anuj ^{[3
]}

Shastri, Vijayendra ^{[1
]}

Pratap, Rudra ^{[1
]}

机构：

[1] Indian Inst Sci, Ctr Nano Sci & Engn, Bangalore, Karnataka, India

[2] Univ Penn, Singh Ctr Nanotechnol, Philadelphia, PA 19104 USA

[3] Purdue Univ, Sch Elect & Comp Engn, W Lafayette, IN 47907 USA

来源：

INTERNATIONAL ULTRASONICS SYMPOSIUM (IEEE IUS 2021) | 2021年

关键词：

PMUTs; Microfluidics; frequency tuning; virtual added mass; ULTRASONIC TRANSDUCERS; ARRAYS;

D O I：

10.1109/IUS52206.2021.9593352

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

We report on the development of a novel technique for creating real-time frequency tuning in Piezoelectric Micromachined Ultrasound Transducers (PMUTs). This technique employs controlled virtual added mass in a confined microfluidic environment as a switch to tune the resonant frequency of a PMUT. Using this technique, we could vary the frequency of a 500 mu m circular PMUT from 489 kHz to 210 kHz, corresponding to a tuning range of 57%. This shows the potential of using such a technique in creating PMUTs with a wide range of frequency tuning.

引用

页数：4