Optimization effect of annealing treatment on oxygen-implanted Nd:CNGG waveguides

被引：18
作者：
Liu, Chun-Xiao [1 ]
Fu, Li-Li [2 ]
Cheng, Liang-Liang [3 ]
Zhu, Xu-Feng [4 ]
Lin, She-Bao [5 ]
Zheng, Rui-Lin [1 ]
Zhou, Zhi-Guang [6 ]
Guo, Hai-Tao [6 ]
Li, Wei-Nan [6 ]
Wei, Wei [1 ]
机构：
[1] Nanjing Univ Posts & Telecommun, Sch Optoelect Engn, Nanjing 210023, Jiangsu, Peoples R China
[2] Nanjing Univ Posts & Telecommun, Coll Elect Sci & Engn, Nanjing 210023, Jiangsu, Peoples R China
[3] Hefei Normal Univ, Sch Elect & Informat Engn, Hefei 230601, Peoples R China
[4] Beijing Aerosp Automat Control Inst, Beijing 100854, Peoples R China
[5] Baoji Univ Arts & Sci, Inst Phys & Optoelect Technol, Baoji 721007, Peoples R China
[6] Chinese Acad Sci, State Key Lab Transient Opt & Photon, Xian Inst Opt & Precis Mech, Xian 710119, Peoples R China
来源：
MODERN PHYSICS LETTERS B | 2016年 / 30卷 / 20期
基金：
中国国家自然科学基金;
关键词：
Waveguide; ion implantation; Nd:CNGG crystal; annealing; ION-IMPLANTATION; PLANAR; GLASS; PROPERTY; CRYSTALS; LINBO3;
D O I：
10.1142/S0217984916502614
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Neodymium-doped calcium niobium gallium garnet (Nd:CNGG) waveguide operated at 632.8 nm is demonstrated by the 3.0-MeV oxygen-ion implantation with a fluence of 6.0 x 10(14) ions/cm(2). The annealing treatment at 300 degrees C for 45 min is carried out to optimize the waveguide quality. The dark-mode spectra are measured by the m-line technique. The refractive index profiles are calculated from the effective refractive indices of the waveguide modes. The near-field intensity distributions are simulated based on the reconstructed refractive index profiles. The annealing treatment process could effectively remove unwanted defects and optimize the waveguide quality. The optical properties of the annealed waveguide are better than that of the as-implanted waveguide.
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页数：8
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