Fabrication of High-Aspect-Ratio Microwire Electrodes Using a Vertical Liquid Membrane Electrochemical Etching Method

被引:2
|
作者
Sang, Yumeng [1 ]
Wu, Xiujuan [2 ]
Zeng, Yongbin [1 ,3 ]
Yang, Tao [1 ]
机构
[1] Nanjing Univ Aeronaut & Astronaut, Coll Mech & Elect Engn, 29 Yudao St, Nanjing 210016, Peoples R China
[2] Nanjing Inst Ind Technol, Sch Mech Engn, Nanjing 210023, Peoples R China
[3] Jiangsu Key Lab Precis & Micromfg Technol, Nanjing 210016, Peoples R China
基金
中国国家自然科学基金;
关键词
Microelectrode; Vertical liquid membrane; Electrochemical etching; Bubble reaction;
D O I
10.1007/s12541-020-00341-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A vertical liquid membrane electrochemical etching method is proposed for the fabrication of high-aspect-ratio microwire electrodes. The potential and current density distributions are simulated using COMSOL software. The simulation results show that the unique potential distribution generated by the proposed method, combined with reciprocating linear motion of the wire electrode, can be used to fabricate microwire electrodes with large aspect ratio. These simulation results are verified experimentally. Different concentrations of electrolyte result in different reaction rates and thus different distributions of the diffusion layer and different bubble flows, resulting in different morphologies of the prepared wire electrodes. The effect of electrolyte concentrations is studied experimentally. At low electrolyte concentrations, the products of electrolysis are removed from the processing area under the action of gravity, and uniform electrodes with high aspect ratio can be prepared. At high electrolyte concentrations, intense bubble production destroys the diffusion layer around the electrode and leads to a dynamic equilibrium state, allowing the preparation of uniform wire electrodes in a rough machining process. The proposed method can prepare wire electrodes with different initial diameters. In this paper, uniform wire electrodes of length 1900 mu m, diameter 7 mu m, and aspect ratio 270 are fabricated by the proposed method from a tungsten wire of initial diameter 50 mu m.
引用
收藏
页码:1347 / 1355
页数:9
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