Design and Simulations of High-Sensitivity Multi-Directional Inertial Sensor

This paper proposed the high sensitive linear and rotational based differential capacitive inertial sensor. The designed sensor consists of a proof of mass, which resides in an air medium - the acceleration measured along with a change of displacement and the differential capacitance. Sensor modeling and simulation have done with CoventorWare software. SOIMUMPS fabrication process has described because it allows pattern on both sides of an SOI wafer. Solid mechanics and electrostatic analysis have applied for measurement of acceleration. The high sensitivity of 981.28fF/g has observed. The simulated results have tabulated. Finally, performance and future scope of the inertial sensor has discussed.