Surface stress effects on the resonance properties of cantilever sensors

被引:131
作者
Lu, P
Lee, HP
Lu, C
O'Shea, SJ
机构
[1] Inst High Performance Comp, Singapore 117528, Singapore
[2] Inst Mat Res & Engn, Singapore 117602, Singapore
关键词
D O I
10.1103/PhysRevB.72.085405
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The effect of surface stress on the resonance frequency of a cantilever sensor is modeled analytically by incorporating strain-dependent surface stress terms into the equations of motion. This mechanistic approach can be equated with a corresponding thermodynamic description, allowing basic equations to be derived that link the analysis to experimentally determined parameters. Examples are shown for the cases of a pure surface stress and an adsorption-induced surface stress, and indicate that frequency measurements may be useful for fundamental understanding of surface and adsorption-induced stresses on metals, semiconductors, and nanoscale structures. Application to biomolecular adsorption sensors appears unlikely.
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页数:5
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