Piezoelectric micropump using dual-frequency drive

被引：36

作者：

Pan, Qiao Sheng ^{[1
]}

He, Liang Guo ^{[1
,2
]}

Huang, Fang Sheng ^{[1
]}

Wang, Xue Yan ^{[1
]}

Feng, Zhi Hua ^{[1
]}

机构：

[1] Univ Sci & Technol China, Dept Precis Machinery & Precis Instrumentat, Hefei 230026, Anhui, Peoples R China

[2] Hefei Univ Technol, Sch Mech & Automot Engn, Hefei 230009, Anhui, Peoples R China

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2015年 / 229卷

基金：

中国国家自然科学基金;

关键词：

Dual frequency drive; Piezoelectric micropump; Vibration wave synthesis;

D O I：

10.1016/j.sna.2015.03.029

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A dual-frequency micropump is proposed and investigated to improve the performance of a piezoelectric micropump for specific application. Through a careful design, the first bending resonant frequency of the vibrator for pumping is one-third of the third bending resonant frequency. When a square wave voltage is used to drive the vibrator, its first and third bending vibration modes are excited. Experimental results show that the maximum flow rate of 163.7 ml/min and a maximum back pressure of 29.7 kPa are obtained when the micropump is driven with a square-wave voltage of 400 Vp-p at 445.5 Hz. Both results are over 155% of those obtained from the single-frequency drive at the same driving voltage swing. (C) 2015 Elsevier B.V. All rights reserved.

引用

页码：86 / 93

页数：8