Piezoelectric micropump using dual-frequency drive

被引：36
作者：
Pan, Qiao Sheng [1 ]
He, Liang Guo [1 ,2 ]
Huang, Fang Sheng [1 ]
Wang, Xue Yan [1 ]
Feng, Zhi Hua [1 ]
机构：
[1] Univ Sci & Technol China, Dept Precis Machinery & Precis Instrumentat, Hefei 230026, Anhui, Peoples R China
[2] Hefei Univ Technol, Sch Mech & Automot Engn, Hefei 230009, Anhui, Peoples R China
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2015年 / 229卷
基金：
中国国家自然科学基金;
关键词：
Dual frequency drive; Piezoelectric micropump; Vibration wave synthesis;
D O I：
10.1016/j.sna.2015.03.029
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A dual-frequency micropump is proposed and investigated to improve the performance of a piezoelectric micropump for specific application. Through a careful design, the first bending resonant frequency of the vibrator for pumping is one-third of the third bending resonant frequency. When a square wave voltage is used to drive the vibrator, its first and third bending vibration modes are excited. Experimental results show that the maximum flow rate of 163.7 ml/min and a maximum back pressure of 29.7 kPa are obtained when the micropump is driven with a square-wave voltage of 400 Vp-p at 445.5 Hz. Both results are over 155% of those obtained from the single-frequency drive at the same driving voltage swing. (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码：86 / 93
页数：8
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