Hybrid and monolithic infrared detector arrays

被引：0

作者：

Van Hoof, C ^{[1
]}

Zimmermann, L ^{[1
]}

John, J ^{[1
]}

De Moor, P ^{[1
]}

Kavadias, S ^{[1
]}

Gastal, M ^{[1
]}

Németh, S ^{[1
]}

Borghs, G ^{[1
]}

Merken, P ^{[1
]}

机构：

[1] IMEC, B-3001 Louvain, Belgium

来源：

FIFTH INTERNATIONAL CONFERENCE ON MATERIAL SCIENCE AND MATERIAL PROPERTIES FOR INFRARED OPTOELECTRONICS | 2001年 / 4355卷

关键词：

IR detection; hybrid integration; uncooled bolometers; surface micromachining; hermetic packaging;

D O I：

10.1117/12.417784

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Infrared detector arrays can be divided in two distinct classes: hybrid (and typically photon) detectors and monolithic (and generally thermal) detectors. Hybrid detectors involve flip-chip integration of the detector array and the readout chip, require cooling and thus cause substantial system cost. Monolithic detectors do not suffer this system overhead and most notably the microbolometer thermal detectors allow ambient operating temperature. IMEC focuses on III-V (InGaAs, InAs and InAsSb) short-wave and mid-infrared detector arrays for hybrid integration on one side and surface-micromachined uncooled polySiGe microbolometer arrays on the other hand. Progress in both types of detector systems is reported.

引用

页码：23 / 31

页数：3

共 50 条

[1] The next generation of monolithic infrared detector arrays
Joshi, AM
Jhabvala, M
Shu, P
SPACE TECHNOLOGY AND APPLICATIONS INTERNATIONAL FORUM - 1998, PTS 1-3: 1ST CONF ON GLOBAL VIRTUAL PRESENCE; 1ST CONF ON ORBITAL TRANSFER VEHICLES; 2ND CONF ON APPLICAT OF THERMOPHYS IN MICROGRAV; 3RD CONF ON COMMERCIAL DEV OF SPACE; 3RD CONF ON NEXT GENERAT LAUNCH SYST; 15TH SYMP ON SPACE NUCL POWER AND PROPULSION, 1998, (420): : 67 - 75
[2] Monolithic InGaAs-on-silicon short wave Infrared Detector Arrays
Joshi, AM
Brown, R
Fitzgerald, EA
Wang, XD
Ting, S
Bulsara, M
PHOTODETECTORS: MATERIALS AND DEVICES II, 1997, 2999 : 211 - 224
[3] HgCdTe monolithic infrared detector
Yakushev, Maxim V.
Dvoretsky, Sergei A.
Kozlov, Alexander I.
Sabinina, Irina V.
Sidorov, Yuri G.
Sorochkin, Alexander V.
Fomin, Boris I.
Aseev, Alexander L.
PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 7 NO 6, 2010, 7 (06): : 1681 - 1683
[4] NOISE SPECTRA FOR MONOLITHIC DETECTOR ARRAYS
FINKEL, MW
THOMPSON, LL
SULLIVAN, RJ
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 1978, 27 (03) : 239 - 242
[5] Infrared detector arrays for astronomy
Rieke, G. H.
ANNUAL REVIEW OF ASTRONOMY AND ASTROPHYSICS, 2007, 45 : 77 - 115
[6] Monolithic arrays of micromachined pixels for infrared applications
Cole, BE
Higashi, RE
Wood, RA
INTERNATIONAL ELECTRON DEVICES MEETING 1998 - TECHNICAL DIGEST, 1998, : 459 - 462
[7] INFRARED DETECTOR ARRAYS BY RF SPUTTERING
CORSI, C
ALFIERI, I
PETROCCO, G
INFRARED PHYSICS, 1972, 12 (04): : 271 - &
[8] MICROCOMPUTER CONTROL OF INFRARED DETECTOR ARRAYS
ROSSANO, GS
PUBLICATIONS OF THE ASTRONOMICAL SOCIETY OF THE PACIFIC, 1986, 98 (606) : 809 - 813
[9] RESPONSIVITY UNIFORMITY OF INFRARED DETECTOR ARRAYS
NORTON, P
RADFORD, W
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1991, 6 (12C) : C96 - C98
[10] INFRARED DETECTOR ARRAYS BY NEW TECHNOLOGIES
CORSI, C
PROCEEDINGS OF THE IEEE, 1975, 63 (01) : 14 - 26

← 1 2 3 4 5 →