Solid state pulsed power systems for plasma immersion ion implantation

被引：0
作者：
Gaudreau, MPJ [1 ]
Casey, JA [1 ]
Kempkes, MA [1 ]
Mulvaney, JM [1 ]
Hawkey, ATJ [1 ]
机构：
[1] Diversified Technol Inc, Bedford, MA 01730 USA
来源：
2000 INTERNATIONAL CONFERENCE ON ION IMPLANTATION TECHNOLOGY, PROCEEDINGS | 2000年
关键词：
D O I：
暂无
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
Diversified Technologies, Inc. (DTI) has developed and patented solid state technology to provide fast, high power switches capable of both opening and closing. These switches are modular, and can be combined in series and/or in parallel to provide a wide range of voltage, current, and power handling capabilities for Plasma Immersion Ion Implantation (PIII).
引用
收藏
页码：496 / 499
页数：4
相关论文
共 50 条
  • [41] Plasma immersion ion implantation for semiconductor processing
    Cheung, NW
    MATERIALS CHEMISTRY AND PHYSICS, 1996, 46 (2-3) : 132 - 139
  • [42] Plasma immersion ion implantation of insulating materials
    Tian, XB
    Fu, KY
    Chu, PK
    Yang, SQ
    SURFACE & COATINGS TECHNOLOGY, 2005, 196 (1-3) : 162 - 166
  • [43] Sheath dynamics in plasma immersion ion implantation
    Gunzel, R
    Brutscher, J
    SURFACE & COATINGS TECHNOLOGY, 1996, 85 (1-2) : 98 - 104
  • [44] Processing considerations with plasma immersion ion implantation
    Cheung, NW
    SURFACE & COATINGS TECHNOLOGY, 2002, 156 (1-3) : 24 - 30
  • [45] Plasma immersion ion implantation for electronic materials
    Jones, EC
    Linder, BP
    Cheung, NW
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (2B): : 1027 - 1036
  • [46] PLASMA IMMERSION ION-IMPLANTATION OF STEELS
    COLLINS, GA
    HUTCHINGS, R
    TENDYS, J
    MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1991, 139 : 171 - 178
  • [47] Numerical simulation of plasma immersion ion implantation
    Liu, Aiguo
    Wang, Xiaofeng
    Tang, Baoyin
    Wang, Songyan
    Tian, Xiubo
    Zeng, Zhaoming
    Zhu, Jianhao
    Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology, 2000, 32 (01): : 111 - 115
  • [48] Plasma Immersion Ion Implantation for SOI fabrication
    Roth, IS
    Bryan, MA
    Liu, W
    Qin, S
    Lamm, AJ
    Chan, C
    PROCEEDINGS OF THE NINTH INTERNATIONAL SYMPOSIUM ON SILICON-ON-INSULATOR TECHNOLOGY AND DEVICES, 1999, 99 (03): : 107 - 110
  • [49] Plasma immersion ion implantation of Pebax polymer
    Kondyurin, A.
    Volodin, P.
    Weber, J.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2006, 251 (02) : 407 - 412
  • [50] Aluminum plasma immersion ion implantation in polymers
    Ueda, M
    Tan, IH
    Dallaqua, RS
    Rossi, JO
    Barroso, JJ
    Tabacniks, MH
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2003, 206 : 760 - 766
12345