Solid state pulsed power systems for plasma immersion ion implantation

被引：0

作者：

Gaudreau, MPJ ^{[1
]}

Casey, JA ^{[1
]}

Kempkes, MA ^{[1
]}

Mulvaney, JM ^{[1
]}

Hawkey, ATJ ^{[1
]}

机构：

[1] Diversified Technol Inc, Bedford, MA 01730 USA

来源：

2000 INTERNATIONAL CONFERENCE ON ION IMPLANTATION TECHNOLOGY, PROCEEDINGS | 2000年

关键词：

D O I：

暂无

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

Diversified Technologies, Inc. (DTI) has developed and patented solid state technology to provide fast, high power switches capable of both opening and closing. These switches are modular, and can be combined in series and/or in parallel to provide a wide range of voltage, current, and power handling capabilities for Plasma Immersion Ion Implantation (PIII).

引用

页码：496 / 499

页数：4

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