A layered Ge2Sb2Te5 phase change material

被引:4
作者
Zhang, Bo [1 ]
Cicmancova, Veronika [2 ]
Kupcik, Jaroslav [3 ]
Slang, Stanislav [2 ]
Pereira, Jhonatan Rodriguez [2 ]
Svoboda, Roman [4 ]
Kutalek, Petr [5 ]
Wagner, Tomas [1 ,2 ]
机构
[1] Univ Pardubice, Fac Chem Technol, Dept Gen & Inorgan Chem, Studentska 573, Pardubice 53210, Czech Republic
[2] Univ Pardubice, Fac Chem Technol, Ctr Mat & Nanotechnol, Nam Cs Legii 565, Pardubice 53002, Czech Republic
[3] ASCR, Inst Inorgan Chem, Husinec Rez 25068, Czech Republic
[4] Univ Pardubice, Fac Chem Technol, Dept Phys Chem, Studentska 573, Pardubice 53210, Czech Republic
[5] Univ Pardubice, Joint Lab Solid State Chem, Studentska 84, Pardubice 53210, Czech Republic
关键词
CHANGE MEMORY; CRYSTALLIZATION; DYNAMICS; MODEL;
D O I
10.1039/c9nr08745a
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
In this study, a universal Ge2Sb2Te5 phase change material was sputtered to obtain a layered structure. The crystalline phase of this material was prepared by annealing. SEM (scanning electron microscopy) and HRTEM (high-resolution transmission electron microscopy) images give confirmed that the sputtered Ge2Sb2Te5 thin film in crystalline phase has multiple layers. The layers can be exfoliated by acetone. The thicknesses of acetone-exfoliated crystalline and amorphous flakes are approx. 10-60 nm.
引用
收藏
页码:3351 / 3358
页数:8
相关论文
共 36 条
[1]  
[Anonymous], 2018, CANC DISCOV
[2]   Ultrafast interfacial transformation from 2D-to 3D-bonded structures in layered Ge-Sb-Te thin films and heterostructures [J].
Behrens, Mario ;
Lotnyk, Andriy ;
Gerlach, Juergen W. ;
Hilmi, Isom ;
Abel, Tobias ;
Lorenz, Pierre ;
Rauschenbach, Bernd .
NANOSCALE, 2018, 10 (48) :22946-22953
[3]   Ultralow-fluence single-shot optical crystalline-to-amorphous phase transition in Ge-Sb-Te nanoparticles [J].
Casarin, Barbara ;
Caretta, Antonio ;
Chen, Bin ;
Kooi, Bart J. ;
Ciprian, Roberta ;
Parmigiani, Fulvio ;
Malvestuto, Marco .
NANOSCALE, 2018, 10 (35) :16574-16580
[4]   RAPID REVERSIBLE LIGHT-INDUCED CRYSTALLIZATION OF AMORPHOUS SEMICONDUCTORS [J].
FEINLEIB, J ;
DENEUFVILLE, J ;
MOSS, SC ;
OVSHINSKY, SR .
APPLIED PHYSICS LETTERS, 1971, 18 (06) :254-+
[5]   Oxygen incorporation into GST phase-change memory matrix [J].
Golovchak, R. ;
Choi, Y. G. ;
Kozyukhin, S. ;
Chigirinsky, Yu. ;
Kovalskiy, A. ;
Xiong-Skiba, P. ;
Trimble, J. ;
Pafchek, R. ;
Jain, H. .
APPLIED SURFACE SCIENCE, 2015, 332 :533-541
[6]   Microscopic origin of the fast crystallization ability of Ge-Sb-Te phase-change memory materials [J].
Hegedus, J. ;
Elliott, S. R. .
NATURE MATERIALS, 2008, 7 (05) :399-405
[7]   The origin of the resistance change in GeSbTe films [J].
Jang, Moon Hyung ;
Park, Seung Jong ;
Park, Sung Jin ;
Cho, Mann-Ho ;
Kurmaev, E. Z. ;
Finkelstein, L. D. ;
Chang, Gap Soo .
APPLIED PHYSICS LETTERS, 2010, 97 (15)
[8]   Electronic properties of amorphous and crystalline Ge2Sb2Te5 films [J].
Kato, T ;
Tanaka, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2005, 44 (10) :7340-7344
[9]  
Knotek P, 2009, J OPTOELECTRON ADV M, V11, P391
[10]   LATTICE-DYNAMICS AND PHONON-DISPERSION IN THE NARROW GAP SEMICONDUCTOR BI2TE3 WITH SANDWICH STRUCTURE [J].
KULLMANN, W ;
EICHHORN, G ;
RAUH, H ;
GEICK, R ;
ECKOLD, G ;
STEIGENBERGER, U .
PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1990, 162 (01) :125-140