Silane-catalysed fast growth of large single-crystalline graphene on hexagonal boron nitride

被引:185
作者
Tang, Shujie [1 ,2 ]
Wang, Haomin [1 ]
Wang, Hui Shan [1 ,3 ]
Sun, Qiujuan [1 ,3 ]
Zhang, Xiuyun [4 ]
Cong, Chunxiao [5 ]
Xie, Hong [1 ]
Liu, Xiaoyu [1 ]
Zhou, Xiaohao [6 ]
Huang, Fuqiang [7 ]
Chen, Xiaoshuang [6 ]
Yu, Ting [5 ]
Ding, Feng [4 ]
Xie, Xiaoming [1 ,8 ]
Jiang, Mianheng [1 ,8 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China
[2] Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China
[3] Cent S Univ, Sch Phys & Elect, Changsha 410083, Hunan, Peoples R China
[4] Hong Kong Polytech Univ, Inst Text & Clothing, Kowloon 999077, Hong Kong, Peoples R China
[5] Nanyang Technol Univ, Sch Phys & Math Sci, Div Phys & Appl Phys, Singapore 637371, Singapore
[6] Chinese Acad Sci, Shanghai Inst Tech Phys, Natl Lab Infrared Phys, Shanghai 200083, Peoples R China
[7] Chinese Acad Sci, Shanghai Inst Ceram, Key Lab Mat Energy Convers, Shanghai 200050, Peoples R China
[8] ShanghaiTech Univ, Sch Phys Sci & Technol, Shanghai 200031, Peoples R China
关键词
CHEMICAL-VAPOR-DEPOSITION; HIGH-QUALITY; MONOLAYER GRAPHENE; DIRAC FERMIONS; FILMS; NUCLEATION; GRAINS; BN; CU;
D O I
10.1038/ncomms7499
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
The direct growth of high-quality, large single-crystalline domains of graphene on a dielectric substrate is of vital importance for applications in electronics and optoelectronics. Traditionally, graphene domains grown on dielectrics are typically only B1 mm with a growth rate of B1 nmmin similar to 1 or less, the main reason is the lack of a catalyst. Here we show that silane, serving as a gaseous catalyst, is able to boost the graphene growth rate to B1 mm min similar to 1, thereby promoting graphene domains up to 20 mm in size to be synthesized via chemical vapour deposition (CVD) on hexagonal boron nitride (h-BN). Hall measurements show that the mobility of the sample reaches 20,000 cm(2)V(-1) s(-1) at room temperature, which is among the best for CVD-grown graphene. Combining the advantages of both catalytic CVD and the ultra-flat dielectric substrate, gaseous catalyst-assisted CVD paves the way for synthesizing high-quality graphene for device applications while avoiding the transfer process.
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页数:7
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