Convective self-assembly of stoeber sphere arrays for syntactic interlayer dielectrics

被引:5
作者
Bunzendahl, M [1 ]
Lee-Van Schaick, P [1 ]
Conroy, JFT [1 ]
Daitch, CE [1 ]
Norris, PM [1 ]
机构
[1] Univ Virginia, Dept Mech & Aerosp Engn, Charlottesville, VA 22904 USA
关键词
dielectric constant; syntactic foam; particle array; convective self-assembly;
D O I
10.1016/S0927-7757(00)00783-4
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A simple protocol for the production of close-packed, Stoeber sphere arrays for use in syntactic low dielectric interlayer materials is described. Particle arrays are formed using convective self-assembly and deposited directly from the production solution. The influence of withdrawal rate and particle size upon film characteristics is given. Finally, evidence of drying-induced film defects is given. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:275 / 283
页数:9
相关论文
共 23 条
[21]   SYNTHESIS AND CHARACTERIZATION OF COLLOIDAL DISPERSIONS OF FLUORESCENT, MONODISPERSE SILICA SPHERES [J].
VANBLAADEREN, A ;
VRIJ, A .
LANGMUIR, 1992, 8 (12) :2921-2931
[22]  
YOSHIMURA H, 1990, ULTRAMICROSCOPY, V16, P411
[23]   Damascene integration of copper and ultra-low-k xerogel for high performance interconnects [J].
Zielinski, EM ;
Russell, SW ;
List, RS ;
Wilson, AM ;
Jin, C ;
Newton, KJ ;
Lu, JP ;
Hurd, T ;
Hsu, WY ;
Cordasco, V ;
Gopikanth, M ;
Korthuis, V ;
Lee, W ;
Cerny, G ;
Russell, NM ;
Smith, PB ;
O'Brien, S ;
Havemann, RH .
INTERNATIONAL ELECTRON DEVICES MEETING - 1997, TECHNICAL DIGEST, 1997, :936-938