Nanostructuring of single crystal diamond by reactive and non-reactive accelerated cluster erosion

被引：8

作者：

Becker, C ^{[1
]}

Gspann, J

Krämer, R

机构：

[1] Univ Karlsruhe, D-76021 Karlsruhe, Germany

[2] Forschungszentrum Karlsruhe, Inst Mikrostrukturtech, D-76021 Karlsruhe, Germany

来源：

EUROPEAN PHYSICAL JOURNAL D | 2001年 / 16卷 / 1-3期

关键词：

D O I：

10.1007/s100530170115

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Reactive accelerated cluster erosion (RACE) of single crystal artificial diamond has been used to fabricate various nano- and microstructures, Carbondioxide clusters of a-bout 1000 molecules are accelerated to 100 keV to act as the eroding agent. Using movable shadow masks, the accelerated cluster beam may erode staircase structures acting as an optical grating. A cycloid gear has been generated cia a stationary nickel mask. Non-reactive accelerated cluster erosion using argon clusters will be considered for comparison.

引用

页码：301 / 304

页数：4

共 11 条

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