Cross-section TEM and optical characterization of porous silicon multilayer stacks

被引：31
作者：
Martín-Palma, RJ
Herrero, P
Guerrero-Lemus, R
Moreno, JD
Martínez-Duart, JM
机构：
[1] Univ Autonoma Madrid, Dept Fis Aplicada, E-28049 Madrid, Spain
[2] CSIC, Inst Ciencia Mat, E-28049 Madrid, Spain
来源：
JOURNAL OF MATERIALS SCIENCE LETTERS | 1998年 / 17卷 / 10期
关键词：
D O I：
10.1023/A:1006654926348
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：845 / 847
页数：3
相关论文
共 8 条
[1]  
BARNA A, 1991, MAT RES SOC S P, V254
[2]   INVESTIGATION AND DESIGN OF OPTICAL-PROPERTIES OF POROSITY SUPERLATTICES [J].
BERGER, MG ;
THONISSEN, M ;
ARENSFISCHER, R ;
MUNDER, H ;
LUTH, H ;
ARNTZEN, M ;
THEISS, W .
THIN SOLID FILMS, 1995, 255 (1-2) :313-316
[3]   POROSITY SUPERLATTICES - A NEW CLASS OF SI HETEROSTRUCTURES [J].
BERGER, MG ;
DIEKER, C ;
THONISSEN, M ;
VESCAN, L ;
LUTH, H ;
MUNDER, H ;
THEISS, W ;
WERNKE, M ;
GROSSE, P .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1994, 27 (06) :1333-1336
[4]   SILICON QUANTUM WIRE ARRAY FABRICATION BY ELECTROCHEMICAL AND CHEMICAL DISSOLUTION OF WAFERS [J].
CANHAM, LT .
APPLIED PHYSICS LETTERS, 1990, 57 (10) :1046-1048
[5]   FORMATION TECHNIQUES FOR POROUS SILICON SUPERLATTICES [J].
FROHNHOFF, S ;
BERGER, MG ;
THONISSEN, M ;
DIEKER, C ;
VESCAN, L ;
MUNDER, H ;
LUTH, H .
THIN SOLID FILMS, 1995, 255 (1-2) :59-62
[6]  
Halimaoui A., 1995, POROUS SILICON SCI T, P33
[7]  
LEHMANN V, 1993, NATO ADV SCI INST SE, V244, P1
[8]   Optical properties of silicon-based materials: A comparison of porous and spark-processed silicon [J].
Ludwig, MH .
CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES, 1996, 21 (04) :265-351
1