Multifunctional tool for expanding AFM-based applications

被引：0

作者：

Deladi, S ^{[1
]}

Tas, NR ^{[1
]}

Krijnen, GJM ^{[1
]}

Elwenspoek, MC ^{[1
]}

机构：

[1] Univ Twente, MESA, Transducers Sci & Technol Dept, Enschede, Netherlands

来源：

Transducers '05, Digest of Technical Papers, Vols 1 and 2 | 2005年

关键词：

fountain pen; AFM; lithography;

D O I：

暂无

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

A multifunctional tool which expands the application field of atomic force micro scope-based surface modification is presented. The AFM-probe can be used for surface modification and in-situ characterization at the same time, due to a special configuration with two cantilevers. Various applications from different fields are presented, which were carried out with one and the same tool: in-situ characterization of wear generated with and without local lubrication (tribology), fountain-pen lithography in which material is deposited or removed (physical-chemistry), and electrochemical metal deposition (electro-chemistry).

引用

页码：159 / 162

页数：4

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