A study on the development of CVD precursors V -: syntheses and characterization of new N-alkoxy-β-ketoiminate complexes of titanium

被引：26
作者：
Lim, S
Choi, B
Min, YS
Kim, D
Yoon, I
Lee, SS
Lee, IM
机构：
[1] Inha Univ, Dept Chem, Nam Ku, Inchon 402751, South Korea
[2] Samsung Adv Inst Technol, Microelect Lab, Yongin 449900, Kyungki, South Korea
[3] Gyeongsang Natl Univ, Dept Chem, Chinju 660701, South Korea
[4] Gyeongsang Natl Univ, Inst Nat Sci, Chinju 660701, South Korea
来源：
JOURNAL OF ORGANOMETALLIC CHEMISTRY | 2004年 / 689卷 / 01期
基金：
新加坡国家研究基金会;
关键词：
D O I：
10.1016/j.jorganchem.2003.10.008
中图分类号：
O61 [无机化学];
学科分类号：
070301 ; 081704 ;
摘要：
The synthesis and characterization of various new titanium N-alkoxy-beta-ketoiminate complexes are reported. Reactions between N-alkoxy-beta-ketoimine ligands and Ti(O-iPr)4 resulted in dimeric [Ti(O-iPr)(2)(N-alkoxy-beta-ketoiminate)](2) complexes or monomeric [Ti(N-alkoxy-beta-ketoiniinate)(2)] ones depending on the amount of ligands. Terdentate N-alkoxy-beta-ketoiminate ligands do not prevent dimer complexes from undergoing disproportional rearrangement to produce Ti(O-iPr)(4) and [Ti(N-alkoxy-beta-ketoiminate)(2)]. The mechanism of this behavior is too complicated but it may include the dissociation and recoordination of ligands. Crystal structures of [Ti(N-alkoxy-beta-ketoiminate)(2)] (MeC(O)CHC(Me)NC(Et)CH2O (3f) and t-BuC(O)CHC(Me)NCH2CH(Me)O (3k)) show that these are distorted octahedron and beta-ketoiminate ligands appear to coordinate as a beta-imino enolate. Two terdentate beta-ketoiminate ligands coordinate meridionally and they are perpendicular to each other. Thermal characteristics of monomeric and dimeric titanium complexes were determined by TGA and DSC and these are reasonably volatile as potential precursors of TiO2 thin films. (C) 2003 Elsevier B.V. All rights reserved.
引用
收藏
页码：224 / 237
页数：14
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