Tunable endoscopic MEMS-probe for optical coherence tomography

被引：0
作者：
Aljasem, K. [1 ]
Werber, A. [1 ]
Zappe, H. [1 ]
机构：
[1] Univ Freiburg, Dept Microsyst Engn IMTEK, Lab Microopt, D-79110 Freiburg, Germany
来源：
2007 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS | 2007年
关键词：
tunable MEMS probe; endoscopic optical coherence tomography; polydimethylsiloxane (PDMS); micro-lens;
D O I：
10.1109/OMEMS.2007.4373813
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A novel miniaturized tunable endoscopic MEMS probe employable in an endoscopic optical coherence tomography (OCT) system is presented. The probe consists of a pneumatically-actuated micro-lens and a GRIN lens coupled to an optical fiber. Silicon micromachining using polydimethylsiloxane was used to fabricate the lens. The probe has a diameter of 5 mm. The successful integration of the tunable endoscopic probe with an OCT imager promises to be of value in medical diagnostics, particularly for the early detection of internal tumors and cancers.
引用
收藏
页码：8 / 9
页数：2
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