100 GHz Reflectometer for Sensitivity Analysis of MEMS Sensors Comprising an Intermediate Frequency Six-Port Receiver

被引：0

作者：

Linz, Sarah ^{[1
]}

Oesterle, Florian ^{[1
]}

Talai, Armin ^{[1
]}

Lindner, Stefan ^{[1
]}

Mann, Sebastian ^{[1
]}

Barbon, Francesco ^{[1
]}

Weigel, Robert ^{[1
]}

Koelpin, Alexander ^{[1
]}

机构：

[1] Univ Erlangen Nurnberg, Inst Elect Engn, Cauerstr 9, D-91058 Erlangen, Germany

来源：

2015 IEEE TOPICAL CONFERENCE ON WIRELESS SENSORS AND SENSOR NETWORKS (WISNET) | 2015年

关键词：

MEMS; Six-port; Microwave Interferometer; W-band; Contactless Testing; Pull-in; Mechanical Sensitivity;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Due to the growing market for Micro Electro Mechanical Systems (MEMS), especially for the application in mobile electronic devices like cameras, phones or tablet computers, cost and time efficient test and evaluation systems are required for the production process. This work presents a novel measurement setup for MEMS microphones, that allows an inline, contactless evaluation of the microphones' mechanical sensitivity at an early stage of the manufacturing process. A heterodyne receiver with a Six-port demodulator is deployed for displacement detection with micrometer resolution. Since the Six-port demodulator allows very high sampling rates, only limited by the analog-to-digital converter, short measurement times can be achieved.

引用

页码：20 / 22

页数：3

共 45 条

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2015 INTERNATIONAL CONFERENCE ON ANTENNA THEORY AND TECHNIQUES (ICATT), 2015,
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