Net shape manufacturing of three-dimensional SiCN ceramic microstructures using an isotropic shrinkage method by introducing shrinkage guiders

被引：19

作者：

Lim, Tae Woo ^{[1
]}

Son, Yong ^{[1
]}

Yang, Dong-Yol ^{[1
]}

Pham, Tuan Anh ^{[2
]}

Kim, Dong-Pyo ^{[2
]}

Yang, Byeong-Il ^{[3
]}

Lee, Kwang-Sup ^{[3
]}

Park, Sang Hu ^{[4
]}

机构：

[1] Korea Adv Inst Sci & Technol, Dept Mech Engn, Taejon 305701, South Korea

[2] Chungnam Natl Univ, Dept Fine Chem Engn & Chem, Taejon 305764, South Korea

[3] Hannam Univ, Dept Adv Mat, Taejon 305811, South Korea

[4] Pusan Natl Univ, Sch Mech Engn, Pusan 609735, South Korea

来源：

INTERNATIONAL JOURNAL OF APPLIED CERAMIC TECHNOLOGY | 2008年 / 5卷 / 03期

关键词：

D O I：

10.1111/j.1744-7402.2008.02234.x

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The two-photon cross-linking (TPC) process using ceramic precursors is recognized as a unique fabrication means of real three-dimensional (3D) ceramic microstructures. These structures can be applied to various microscale devices that are used in harsh conditions that demand high strength, high temperature endurance, and good chemical corrosion properties. However, the large shrinkage amount of 3D structures during pyrolysis is a serious limitation to the practical application of these structures; during pyrolysis, asymmetric distortion and shrinkage occur intrinsically. In an attempt to address this, a method is proposed for the precise fabrication of 3D ceramic microstructures that utilize shrinkage guiders to lead to isotropic shrinkage. SiCN ceramic woodpile structures were fabricated to show the efficiency and usefulness of the proposed method. In the results, the woodpiles showed no distortion after pyrolysis.

引用

页码：258 / 264

页数：7

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