C1-C4 hydrocarbon release in the preparation of SiF4 through Na2SiF6 pyrolysis

被引:4
|
作者
Krylov, V. A. [1 ,2 ]
Sorochkina, T. G. [1 ]
Bulanov, A. D. [1 ]
Lashkov, A. Yu. [1 ]
机构
[1] Russian Acad Sci, Inst Chem High Pur Subst, Nizhnii Novgorod 603950, Russia
[2] Lobachevsky State Univ, Nizhnii Novgorod 603950, Russia
关键词
SILICON TETRAFLUORIDE; THERMAL-DISSOCIATION; IMPURITIES;
D O I
10.1134/S0020168511120089
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Hydrocarbon impurities in silicon tetrafluoride originate from the sodium hexafluorosilicate used as a precursor for the preparation of SiF4 through the thermal decomposition of Na2SiF6. We have studied the fraction of C-1-C-4 hydrocarbons released as a function of temperature during the thermal decomposition of sodium hexafluorosilicate. The lighter hydrocarbons-methane, ethane, and ethylene-are shown to be released at lower temperatures. One source of hydrocarbon impurities in sodium hexafluorosilicate is the sodium carbonate used to prepare it.
引用
收藏
页码:7 / 9
页数:3
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