Versatile route to gapless microlens arrays using laser-tunable wet-etched curved surfaces

被引：64

作者：

Hao, Bian ^{[1
,2
]}

Liu, Hewei ^{[1
,2
]}

Chen, Feng ^{[1
,2
]}

Yang, Qing ^{[1
,2
]}

Qu, Pubo ^{[1
,2
]}

Du, Guangqing ^{[1
,2
]}

Si, Jinhai ^{[1
,2
]}

Wang, Xianhua ^{[1
,2
]}

Hou, Xun ^{[1
,2
]}

机构：

[1] Xi An Jiao Tong Univ, Sch Elect & Informat Engn, State Key Lab Mfg Syst Engn, Xian 710049, Peoples R China

[2] Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Key Lab Photon Technol Informat, Xian 710049, Peoples R China

来源：

OPTICS EXPRESS | 2012年 / 20卷 / 12期

基金：

美国国家科学基金会;

关键词：

FEMTOSECOND LASER; 2-PHOTON POLYMERIZATION; SELF-ORGANIZATION; FABRICATION; PHOTOLITHOGRAPHY;

D O I：

10.1364/OE.20.012939

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This work reveals a cost-efficient and flexible approach to various microlens arrays on polymers, which is essential to micro-optics elements. An 800-nm femtosecond laser is employed to control the hydrofluoric (HF) acid etching process on silica glasses, and concave microstructures with smooth curved surfaces are produced by this method. Then, the micro-structured glass templates can serve as molds for replicating microlenses on polymers. In this paper, a high-ordered microlens array with over 16,000 hexagonal-shaped lenses is fabricated on poly (dimethyl siloxane) [PDMS], and its perfect light-gathering ability and imaging performance are demonstrated. The flexibility of this method is demonstrated by successful preparation of several concave molds with different patterns which are difficult to be obtained by other methods. This technique provides a new route to small-scaled, smooth and curved surfaces which is widely used in micro-optics, biochemical analysis and superhydrophobic interface. (C) 2012 Optical Society of America

引用

页码：12939 / 12948

页数：10

共 19 条

[1] SELF-ORGANIZATION OF ORGANIC LIQUIDS ON PATTERNED SELF-ASSEMBLED MONOLAYERS OF ALKANETHIOLATES ON GOLD [J].